| [1] | Tuell, M. T. et al. Fabrication of the LSST monolithic primary-tertiary mirror. SPIE Astronomical Telescopes + Instrumentation. 8450, 1531-1546 (2012). |
| [2] | Araujo-Hauck, C. et al. LSST mirror system status: from design to fabrication and integration. SPIE Astronomical Telescopes + Instrumentation. 9906, 202-211 (2016). |
| [3] | Alvarez, P., López-Tarruella, J. C. & Rodriguez-Espinosa, J. The GTC project: preparing the first light. SPIE Astronomical Telescopes + Instrumentation. 6267, 70-79 (2006). |
| [4] | Barnes III, T. G. et al. Commissioning experience with the 9.2-m Hobby-Eberly Telescope. Astronomical Telescopes and Instrumentation. 4004, 14-25 (2000). |
| [5] | Allen, L. N. et al. Surface error correction of a Keck 10-m telescope primary mirror segment by ion figuring. San Diego, '91. 1531, 195-204 (1992). |
| [6] | Kudryavtsev, D. O. & Vlasyuk, V. V. The Largest Russian Optical Telescope BTA: Current Status and Modernization Prospects. arXiv preprint arXiv: 2012.08754 (2020). |
| [7] | Iye, M. et al. Current performance and on-going improvements of the 8.2 m Subaru Telescope. Publications of the Astronomical Society of Japan. 56, 381-397 (2004). |
| [8] | Cayrel, M. Completion of VLT and GEMINI primary mirrors at REOSC. Astronomical Telescopes and Instrumentation. 4003, 14-23 (2000). |
| [9] | Johns, M. et al. Giant magellan telescope: overview. SPIE Astronomical Telescopes + Instrumentation. 8444, 526-541 (2012). |
| [10] | Stobie, R., Meiring, J. G. & Buckley, D. A. Design of the southern African large telescope (SALT). Astronomical Telescopes and Instrumentation. 4003, 355-362 (2000). |
| [11] | Liu, Z., Deng, Y. & Ji, H. Introduction to the Chinese Giant Solar Telescope. Proceedings of SPIE-The International Society for Optical Engineering. 8444, 213 (2012). |
| [12] | Neufeld, C. et al. The active primary mirror assembly for the SOAR telescope. SPIE Astronomical Telescopes + Instrumentation. 5489, 870-880 (2004). |
| [13] | McMullin, J. P. et al. The Advanced Technology Solar Telescope: Design and Early Construction. SPIE Astronomical Telescopes + Instrumentation. 8444, 41-52 (2012). |
| [14] | Hill, J. M. The Large Binocular Telescope. Applied Optics 49, D115-D122 (2010). |
| [15] | Bourgois, R. et al. ELT optics polishing: year 1 report. SPIE Astronomical Telescopes + Instrumentation. 10706, 246-255 (2018). |
| [16] | Ioannisiani, B. K. et al. The Zelenchuk 6m Telescope (BTA) of the USSR Academy of Sciences. International Astronomical Union Colloquium 67, 3-9 (1982). |
| [17] | Liu, Z. et al. Introduction to the Chinese Giant Solar Telescope (SPIE, 2012). |
| [18] | McMullin, J. et al. The Advanced Technology Solar Telescope: design and early construction (SPIE, 2012). |
| [19] | Bourgois, R. et al. ELT optics polishing: year 1 report (SPIE, 2018). |
| [20] | Korhonen, T. et al. Polishing and testing of the 3.5 m SiC M1 mirror of the Herschel space observatory of ESA. Optical Systems Design. 7102, 423-429 (2008). |
| [21] | Stahl, H. P. JWST mirror technology development results. Optical Engineering + Applications. 6671, 11-22 (2007). |
| [22] | Zhang, X. et al. Challenges and strategies in high-accuracy manufacturing of the world’s largest SiC aspheric mirror. Light: Science & Applications 11, 310 (2022). |
| [23] | Zhang, G. Gelcasting process of 1.5 m SiC ceramic green body. Optics and Precision Engineering 21, 2989-2993 (2013). |
| [24] | Bai, Y. et al. Material removal model of magnetorheological finishing based on dense granular flow theory. Light: Advanced Manufacturing 3, 630-639 (2022). |
| [25] | Hu, H. et al. Designing a hydraulic support system for large monolithic mirror’s precise in-situ testing-polishing iteration. Optics Express 27, 3746-3760 (2019). |
| [26] | Hill, J. M. & Salinari, P. The large binocular telescope project. SPIE Astronomical Telescopes + Instrumentation. 5489, 603-614 (2004). |
| [27] | Nelson, J. & Mast, T. Construction of the Keck Observatory. SPIE Astronomical Telescopes and Instrumentation for the 21st Century 1236, 47-55 (1990). |
| [28] | Bos, A. et al. Nanometre-accurate form measurement machine for E-ELT M1 segments. 40, 14-25 (2015). |
| [29] | Tuell, M. T. et al. Final acceptance testing of the LSST monolithic primary/tertiary mirror. Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation. 9151, 271-287 (2014). |
| [30] | Jacobs, S. D. et al. Magnetorheological finishing: a deterministic process for optics manufacturing. International conference on optical fabrication and testing. 2576, 372-382 (1995). |
| [31] | Comley, P. et al. Grinding metre scale mirror segments for the E-ELT ground based telescope. 60, 379-382 (2011). |
| [32] | Yu, G. , Walker, D. D. & Li, H. Research on fabrication of mirror segments for E-ELT. 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. 8416, 19-24 (2012). |
| [33] | Nee, A. Y. C. Handbook of manufacturing engineering and technology (Springer Publishing Company, Incorporated, 2014). |
| [34] | Yu, G. et al. Research on edge-control methods in CNC polishing. 13, 24 (2017). |
| [35] | Hu, H. et al. Rapid fabrication strategy for Ø1. 5 m off-axis parabolic parts using computer-controlled optical surfacing. 57, F37-F43 (2018). |
| [36] | Frapolli, C. et al. Key challenges for the production of ELT M1 segments at Safran Reosc. SPIE Astronomical Telescopes + Instrumentation. 12188, 135-147 (2022). |
| [37] | Frapolli, C. et al. Radius of curvature matching for the Extremely Large Telescope M1. Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation VI. 13100, 180-190 (2024). |
| [38] | Zhang, P. et al. Application and development of bonnet polishing technology. 63, 100901-100901 (2024). |
| [39] | Cayrel, M. E-ELT optomechanics: overview. Ground-based airborne telescopes IV. 8444, 674-691 (2012). |
| [40] | Lawson, J. et al. Specification of optical components using the power spectral density function (SPIE, 1995). |
| [41] | Duparré, A. et al. Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components. Applied Optics 41, 154-171 (2002). |
| [42] | Randi, J. A., Lambropoulos, J. C. & Jacobs, S. D. Subsurface damage in some single crystalline optical materials. Applied Optics 44, 2241-2249 (2005). |
| [43] | Cole, G. C. et al. An overview of optical fabrication of the JWST mirror segments at Tinsley. SPIE Astronomical Telescopes + Instrumentation. 6265, 253-261 (2006). |
| [44] | Ji, P. et al. Towards a better understanding of the surface smoothing effect in gas cluster ion beam processing with molecular dynamics simulation and experiment. Optics Express 32, 31965-31983 (2024). |
| [45] | Du, C. et al. High precision fabrication of aluminum optics by optimizing an Ar+ ion beam figuring strategy for polishing the contamination layer. Optics Express 29, 28886-28900 (2021). |
| [46] | Oh, C. J. et al. Fabrication and testing of 4.2 m off-axis aspheric primary mirror of Daniel K. Inouye Solar Telescope. SPIE Astronomical Telescopes + Instrumentation. 9912, 210-221 (2016). |
| [47] | Martin, H. et al. Manufacture of a combined primary and tertiary mirror for the Large Synoptic Survey Telescope. SPIE Astronomical Telescopes + Instrumentation. 7018, 143-154 (2008). |
| [48] | Golini, D., Jacobs, Stephen D Physics of loose abrasive microgrinding. Applied Optics. 30, 2761-2777 (1991). |
| [49] | Dong, Z. , Cheng, H. J. I. J. o. M. T. & Manufacture. Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets. 85, 1-13 (2014). |
| [50] | Trumper, I. et al. Optics technology for large-aperture space telescopes: from fabrication to final acceptance tests. 10, 644-702 (2018). |
| [51] | Suratwala, T. et al. Towards predicting removal rate and surface roughness during grinding of optical materials. 58, 2490-2499 (2019). |
| [52] | Pilbratt, G. L. et al. Herschel Space Observatory-An ESA facility for far-infrared and submillimetre astronomy. Astronomy & Astrophysics 518, L1 (2010). |
| [53] | Sein, E. et al. A 3.5 m diameter SiC telescope for Herschel mission. Astronomical Telescopes and Instrumentation. 4850, 606-618 (2003). |
| [54] | Toulemont, Y. et al. The 3.5-m all-SiC telescope for HERSCHEL. SPIE Astronomical Telescopes + Instrumentation. 5487, 1119-1128 (2004). |
| [55] | Yi, L. et al. Equivalent thin-plate method for stressed mirror polishing of an off-axis aspheric silicon carbide lightweight mirror. Optics Express 28, 36413-36431 (2020). |
| [56] | Yi, L. et al. Comprehensive study of the rapid stressed mirror polishing method for off-axis aspheric SiC thin-plate mirrors. Optics Express 28, 32802-32818 (2020). |
| [57] | Martin, H. M. et al. Fabrication of mirrors for the Magellan Telescopes and the Large Binocular Telescope. Astronomical Telescopes and Instrumentation. 4837, 609-618 (2003). |
| [58] | Martin, H. M. et al. Active supports and force optimization for the MMT primary mirror. Astronomical Telescopes and Instrumentation. 3352, 412-423 (1998). |
| [59] | Parodi, G. , Hill, J. & Salinari, P. Supporting the 8.4 m honeycomb mirrors of Columbus. Progress in Telescope and Instrumentation Technologies, ESO Conference and Workshop Proceedings, ESO Conference on Progress in Telescope and Instrumentation Technologies, ESO, Garching, 27-30 April 1992, Garching: European Southern Observatory (ESO), 1992, edited by Marie-Helene Ulrich, p. 301. 42, 301 (1992). |
| [60] | West, S. C. et al. Practical design and performance of the stressed-lap polishing tool. Applied Optics 33, 8094-8100 (1994). |
| [61] | Bernstein, R. et al. Overview and status of the Giant Magellan Telescope project. SPIE Astronomical Telescopes + Instrumentation. 9145, 494-509 (2014). |
| [62] | Bifano, T. , Dow, T. A. & Scattergood, R. Microgrinding Optical Materials. Optical Fabrication and Testing. WC3 (1988). |
| [63] | Angel, J. R. P. & Parks, R. E. Lapping & Polishing with an Actively Stressed Lap. Workshop on Optical Fabrication and Testing. ThDA4 (1984). |
| [64] | Negi, V. S. et al. Challenges in the Fabrication of Off-Axis Mirror. (2021). |
| [65] | Zhao, H. et al. Deformation verification and surface improvement of active stressed lap for 4 m-class primary mirror fabrication. Applied Optics 54, 2658-2664 (2015). |
| [66] | Bifano, T. G. , Dow, T. A. & Scattergood, R. O. J. J. o. E. f. I. Ductile-Regime Grinding: A New Technology for Machining Brittle Materials. 113, 184-189 (1991). |
| [67] | Martin, H. M. et al. Stressed-lap Polishing of Large, Highly Aspheric Primary Mirrors. Optical Fabrication and Testing Workshop. ThA5 (1992). |
| [68] | Tzordanidi, G. et al. Statistical model of metal removal removed from product surface under the influence of abrasive particle flow. (2020). |
| [69] | Martin, H. M. J. O. & News, P. Aspheric polishing with a stressed lap. 1, 22-24 (1990). |
| [70] | Pileri, D. & Krabbendam, V. L. Hobby-Eberly primary mirror fabrication. SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation. 2536, 344-349 (1995). |
| [71] | Jacobus, G. M. et al. Southern African Large Telescope (SALT) project: progress and status after two years. Astronomical Telescopes and Instrumentation. 4837, 11-25 (2003). |
| [72] | Semenov, A. P. et al. Fabrication of blanks, figuring, polishing, and testing of segmented astronomic mirrors for SALT and LAMOST projects. SPIE Astronomical Telescopes + Instrumentation. 5494, 31-38 (2004). |
| [73] | Nelson, J. The Keck Telescope: a new technology substitutes electronics for steel. American Scientist 77, 170-176 (1989). |
| [74] | Mast, T. S. & Nelson, J. E. Fabrication of the Keck ten meter telescope primary mirror. 1985 Albuquerque Conferences on Optics. 542, 48-59 (1985). |
| [75] | Martin, H. et al. Fabrication and testing of the first 8.4-m off-axis segment for the Giant Magellan Telescope. SPIE Astronomical Telescopes + Instrumentation. 7739, 84-96 (2010). |
| [76] | Krabbendam, V. L. et al. Development and performance of Hobby-Eberly Telescope 11-m segmented mirror. Astronomical Telescopes and Instrumentation. 3352, 436-445 (1998). |
| [77] | Martin, H. M. et al. Manufacture of primary mirror segments for the Giant Magellan Telescope. SPIE Astronomical Telescopes + Instrumentation. 10706, 236-245 (2018). |
| [78] | Fan, C. et al. Local material removal model considering the tool posture in deterministic polishing. 0954406215598800 (2015). |
| [79] | Smith, B. K. , Burge, J. H. & Martin, H. M. Fabrication of the 1.2 m Secondary Mirror for the Sloan Digital Sky Survey. Optical Fabrication and Testing. OFD. 5 (1996). |
| [80] | Martin, H. M. et al. Manufacture and final tests of the LSST monolithic primary/tertiary mirror. SPIE Astronomical Telescopes + Instrumentation. 9912, 278-294 (2016). |
| [81] | Jones, R. A. Fabrication of a large, thin, off-axis aspheric mirror. Optical Engineering 33, 4067-4075 (1994). |
| [82] | Martin, H. et al. Manufacture of the second 8.4 m primary mirror for the Large Binocular Telescope. SPIE Astronomical Telescopes + Instrumentation. 6273, 99-108 (2006). |
| [83] | Harris, D. C. History of magnetorheological finishing. SPIE Defense, Security, and Sensing. 8016, 206-227 (2011). |
| [84] | Li, L. , Study on the key techniques of magnetorheological finishing for large aspheric optics [D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2016. |
| [85] | Chen, S., Weng, Y. & Yao, B. Material removal model for magnetorheological polishing considering shear thinning and experimental verification. Materials Today Communications 38, 108475 (2024). |
| [86] | Lu, M. -M. et al. Research progress of magnetorheological polishing technology: a review. Advances in Manufacturing 12, 642-678 (2024). |
| [87] | Zhao, C. et al. Improving detection accuracy of extreme-few-pixel Shack-Hartmann wavefront sensor based on tilt modulation. Optics Communications 570, 130884 (2024). |
| [88] | Li, L. et al. Positive dwell time algorithm with minimum equal extra material removal in deterministic optical surfacing technology. Applied Optics 56, 9098-9104 (2017). |
| [89] | Hull, T. et al. Lightweight high-performance 1-4 meter class spaceborne mirrors: emerging technology for demanding spaceborne requirements. SPIE Astronomical Telescopes + Instrumentation. 7739, 104-117 (2010). |
| [90] | Li, L. et al. Rapid fabrication of a lightweight 2 m reaction-bonded SiC aspherical mirror. Results Phys 10, 903-912 (2018). |
| [91] | Bai, Y. et al. Rapid fabrication of a silicon modification layer on silicon carbide substrate. Applied Optics 55, 5814-5820 (2016). |
| [92] | Liu, S. et al. Combined processing strategy based on magnetorheological finishing for monocrystalline silicon x-ray mirrors. Applied Optics 61, 5575-5584 (2022). |
| [93] | Zhang, W. et al. Design of arrayed magnetorheological equipment applied in optics manufacture. Optics & Laser Technology 158, 108892 (2023). |
| [94] | Guo, J. et al. Material removal mechanism and MR fluid for magnetorheological finishing of an RSA-6061 aluminum alloy mirror. Applied Optics 61, 10098-10104 (2022). |
| [95] | Li, Y. et al. Evolution mechanism of scratch removal based on the implementation of magnetorheological finishing. Optics Express 32, 11241-11258 (2024). |
| [96] | Bai, Y. et al. High precision polishing of aluminum alloy mirrors through a combination of magnetorheological finishing and chemical mechanical polishing. Optics Express 32, 15813-15826 (2024). |
| [97] | Tian, Y. et al. Combined polishing process of a sapphire aspherical component based on temperature-controlled magnetorheological processing. Applied Optics 62, 805-812 (2023). |
| [98] | Lin, Z. et al. Prediction of surface roughness and the material removal rate in magnetorheological finishing. Optics Express 30, 46157-46169 (2022). |
| [99] | Liu, X. et al. Tool mark prediction on the surface of large-aperture mirrors via magnetorheological finishing. Optics Express 32, 11150-11170 (2024). |
| [100] | Chen, C. et al. Study on the influence of a magnetorheological finishing path on the mid-frequency errors of optical element surfaces. Optics Express 32, 19133-19145 (2024). |
| [101] | Xu, M. et al. Investigation of surface characteristics evolution and laser damage performance of fused silica during ion-beam sputtering. Optical Materials 58, 151-157 (2016). |
| [102] | Gressler, W. J. et al. LSST secondary mirror assembly. SPIE Astronomical Telescopes + Instrumentation. 10700, 371-396 (2018). |
| [103] | Cui, X. Progress and prospect of LAMOST project. SPIE Astronomical Telescopes + Instrumentation. 6267, 22-29 (2006). |
| [104] | Smith, G. M. Keck II status report. Optical Telescopes of Today and Tomorrow. 2871, 10-14 (1997). |
| [105] | Burge, J. H. et al. Design and analysis for interferometric measurements of the GMT primary mirror segments. SPIE Astronomical Telescopes + Instrumentation. 6273, 176-187 (2006). |
| [106] | Tuell, M. et al. Data processing for fabrication of GMT primary segments: raw data to final surface maps. SPIE Astronomical Telescopes + Instrumentation. 9151, 1286-1297 (2014). |
| [107] | Geyl, R. , Cayrel, M. & Tarreau, M. Gran Telescopio Canarias optics manufacture: progress report no. 2. Optical Systems Design. 5252, 63-68 (2003). |
| [108] | Geyl, R. , Cayrel, M. & Tarreau, M. Gran Telescopio Canarias optics manufacture: progress report no. 3. SPIE Astronomical Telescopes + Instrumentation. 5494, 57-61 (2004). |
| [109] | Geyl, R. et al. First steps in ELT optics polishing. Fifth European Seminar on Precision Optics Manufacturing. 10829, 16-25 (2018). |
| [110] | Jedamzik, R., Werner, T. & Westerhoff, T. Production of the world’s largest convex ZERODUR mirror blank for the ELT. SPIE Astronomical Telescopes + Instrumentation. 11445, 369-380 (2020). |
| [111] | Tonnellier, X. et al. Surface error correction of ELT primary mirror hexagonal segments by ion figuring. SPIE Astronomical Telescopes + Instrumentation. 13100, 1160-1164 (2024). |
| [112] | Tozzi, A. et al. Toward ARIEL's primary mirror. Space Telescopes and Instrumentation 2022: Optical, Infrared, and Millimeter Wave 12180 (2022). |
| [113] | Araiza-Durán, J. A. et al. Hartmann test using a screen with arbitrarily positioned holes. Applied Optics 63, 5338-5345 (2024). |
| [114] | D'Anca, F. et al. Development, manufacturing, and testing of Ariel’s structural model prototype flexure hinges. SPIE Astronomical Telescopes + Instrumentation. 13092, 1485-1496 (2024). |
| [115] | Pace, E. et al. The telescope assembly of the Ariel space mission: an updated overview. SPIE Astronomical Telescopes + Instrumentation. 13092, 419-429 (2024). |
| [116] | Burgett, W. S. et al. The Giant Magellan Telescope project in 2024: status and look ahead. 45 (2024). |
| [117] | Martin, H. et al. Production of 8.4 m primary mirror segments for GMT. Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation V. 12188, 177-184 (2022). |
| [118] | Walker, D. et al. The role of robotics in computer controlled polishing of large and small optics. Optical Manufacturing and Testing Xi. 9575, 50-58 (2015). |
| [119] | Pan, R. et al. Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system. 65, 134-143 (2021). |
| [120] | Li, L. et al. New generation magnetorheological finishing polishing machines using robot arm. AOPC 2019: Space Optics, Telescopes, and Instrumentation. 11341, 315-318 (2019). |
| [121] | Cheng, R. et al. Accurately predicting the tool influence function to achieve high-precision magnetorheological finishing using robots. 31, 34917-34936 (2023). |
| [122] | Invernizzi, A. et al. ELT secondary mirror manufacturing progress at Safran Reosc. Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation IV. 11451, 81-94 (2020). |
| [123] | Gu, P. et al. A grinding force prediction model for SiCp/Al composite based on single-abrasive-grain grinding. The International Journal of Advanced Manufacturing Technology 109, 1563-1581 (2020). |
| [124] | Wang, S. et al. Ultra-precision raster grinding biconical optics with a novel profile error compensation technique based on on-machine measurement and wavelet decomposition. Journal of Manufacturing Processes 67, 128-140 (2021). |
| [125] | Shanmugam, P., Lambropoulos, J. C. & Davies, M. A. Grinding of silicon carbide for optical surface fabrication, Part 1: surface analysis. Applied Optics 61, 4579-4590 (2022). |
| [126] | Shanmugam, P., Lambropoulos, J. C. & Davies, M. A. Grinding of silicon carbide for optical surface fabrication. Part II. Subsurface damage. Applied Optics 62, 3788-3796 (2023). |
| [127] | Sun, Z. et al. Ultra-precision time-controlled grinding for flat mechanical parts with weak stiffness. Journal of Manufacturing Processes 99, 105-120 (2023). |
| [128] | Wang, S. et al. Evaluation of grinding characteristics for sapphire ultra-precision grinding using small grit sizes wheels based on AE signals. Journal of Manufacturing Processes 90, 94-110 (2023). |
| [129] | Gu, P. et al. An error compensation method for single point oblique axis grinding considering the grinding wheel wear. Journal of Manufacturing Processes 112, 32-44 (2024). |
| [130] | Sun, G. et al. Material removal and surface generation mechanisms in rotary ultrasonic vibration–assisted aspheric grinding of glass ceramics. The International Journal of Advanced Manufacturing Technology 130, 3721-3740 (2024). |
| [131] | Wei, Q. et al. Ultra-precision milling and grinding for large-sagittal MgF2 aspheric optical elements. The International Journal of Advanced Manufacturing Technology 131, 2985-3004 (2024). |
| [132] | Echerfaoui, Y., El Ouafi, A. & Sattarpanah Karganroudi, S. Dynamic errors compensation of high-speed coordinate measuring machines using ANN-based predictive modeling. The International Journal of Advanced Manufacturing Technology 122, 2745-2759 (2022). |
| [133] | Mohammadi, F. , Mirhashemi, M. & Rashidzadeh, R. A coordinate measuring machine with error compensation in feature measurement: model development and experimental verification. The International Journal of Advanced Manufacturing Technology, 1-11 (2022). |
| [134] | Moona, G. et al. Measurement uncertainty assessment of articulated arm coordinate measuring machine for length measurement errors using Monte Carlo simulation. The International Journal of Advanced Manufacturing Technology 119, 5903-5916 (2022). |
| [135] | Song, M. et al. Calibration method of articulated arm coordinate measuring machine based on virtual calibrators. The International Journal of Advanced Manufacturing Technology 139, 6343-6353 (2025). |
| [136] | Geyl, R., Cayrel, M. & Tarreau, M. Gran telescopio canarias optics manufacture. SPIE Astronomical Telescopes + Instrumentation. 6273, 56-61 (2006). |
| [137] | Dierickx, P. et al. VLT primary mirrors: mirror production and measured performance. Optical Telescopes of Today and Tomorrow. 2871, 385-392 (1997). |
| [138] | Bacouel, A. et al. Hexagonal cutting for ELT M1. SPIE Astronomical Telescopes + Instrumentation. 13100, 1102-1111 (2024). |
| [139] | Liang, Z. J. et al. Advances in research and applications of optical aspheric surface metrology. Chinese Optics 15, 161-186 (2022). |
| [140] | Anderson, D. S. & Burge, J. H. Swing-arm profilometry of aspherics. SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation. 2536, 169-179 (1995). |
| [141] | Zhu, R. H., Sun, Y. & Shen, H. Progress and prospect of optical freeform surface measurement. Acta Optica Sinica 41, 0112001 (2021). |
| [142] | Oh, C. J. et al. Modern technologies of fabrication and testing of large convex secondary mirrors. SPIE Astronomical Telescopes + Instrumentation. 9912, 238-249 (2016). |
| [143] | Anugu, N., Garcia, P. J. V. & Correia, C. M. Peak-locking centroid bias in Shack–Hartmann wavefront sensing. Monthly Notices of the Royal Astronomical Society 476, 300-306 (2018). |
| [144] | Xiong, L. , Research on Swing Arm profilometer test for large-aperture complex optical surface[D], Changchun Institute of Optics, Fine Mechanics and Physics, University of Chinese Academy of Sciences, 2017. |
| [145] | Berlakovich, N. et al. Fast modal reconstruction of large plane wavefronts from sparse measurements using Shack–Hartmann sensors. Applied Optics 62, 6986-6992 (2023). |
| [146] | He, C. et al. A theoretical and deep learning hybrid model for predicting surface roughness of diamond-turned polycrystalline materials. International Journal of Extreme Manufacturing 5, 035102 (2023). |
| [147] | Zhang, L. et al. Optical free-form surfaces testing technologies. Chinese Optics 10, 283-299 (2017). |
| [148] | Häusler, G. et al. Deflectometry vs. interferometry. SPIE Optical Metrology 2013. 8788, 367-377 (2013). |
| [149] | Knauer, M. C., Kaminski, J. & Hausler, G. Phase measuring deflectometry: a new approach to measure specular free-form surfaces. Photonics Europe. 5457, 366-376 (2004). |
| [150] | Su, P. et al. Software configurable optical test system: a computerized reverse Hartmann test. Applied Optics 49, 4404-4412 (2010). |
| [151] | Su, P. et al. Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test. Optical Engineering 53, 031305-031305 (2014). |
| [152] | Zheng, Y. et al. Fringe projection-based single-shot 3d eye tracking using deep learning and computer graphics. SPIE AR | VR | MR. 12449, 265-275 (2023). |
| [153] | Shen, M. et al. Deep learning based measurement accuracy improvement of high dynamic range objects in fringe projection profilometry. Optics Express 32, 35689-35702 (2024). |
| [154] | Zhang, K. et al. Single-frame two-stage fringe projection profilometry based on deep learning. Applied Optics 64, 855-865 (2025). |
| [155] | Li, J. et al. Dual-biprism-based coaxial fringe projection system. Applied Optics 61, 3957-3964 (2022). |
| [156] | Zhang, X. et al. Phase retrieval from single-shot square wave fringe based on image denoising using deep learning. Applied Optics 63, 1160-1169 (2024). |
| [157] | Di, R. et al. Lossless background encoding and phase-difference labeling used in fringe projection profilometry for high-precision three-dimensional reconstruction. Optics & Laser Technology 189, 113021 (2025). |
| [158] | Yu, H. et al. Accurate defocusing fringe projection profilometry in a large depth-of-field. Optics & Laser Technology 164, 109542 (2023). |
| [159] | Chen, M. et al. Recent developments of multi-aperture overlap-scanning technique. Optical Science and Technology, SPIE's 48th Annual Meeting. 5180, 393-401 (2003). |
| [160] | GC Righini, A. C. 19th Congress of the International Commission for Optics: Optics for the Quality of Life. Proceedings of SPIE-The International Society for Optical Engineering. 4829 (2003). |
| [161] | Wang, X. K. et al. Test of an off-axis asphere by subaperture stitching interferometry. 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 72832J (2009). |
| [162] | Chen, W. et al. Null test of large convex aspheres by subaperture stitching with replaceable holograms. Optics Communications 466, 125665 (2020). |
| [163] | Cho, M., Liang, M. & Neill, D. Performance prediction of the LSST secondary mirror. SPIE Optical Engineering + Applications. 7424, 47-57 (2009). |
| [164] | Burge, J. H., Su, P. & Zhao, C. Optical metrology for very large convex aspheres. SPIE Astronomical Telescopes + Instrumentation. 7018, 421-432 (2008). |
| [165] | Mercier-Ythier, R. et al. Development of an interferometric test bench for the manufacturing of the ELT secondary mirror. SPIE Optical Systems Design. 13021, 96-109 (2024). |
| [166] | Kim, G. et al. Dual subaperture stitching for large flat mirror testing. Applied Optics 59, 8681-8687 (2020). |
| [167] | Pan, F. et al. Stitching sub-aperture in digital holography based on machine learning. Optics Express 28, 6537-6551 (2020). |
| [168] | Wang, R. et al. Subaperture stitching interferometry based on the combination of the phase correlation and iterative gradient methods. Applied Optics 59, 4176-4182 (2020). |
| [169] | Stašík, M. et al. Subaperture stitching computation time optimization using a system of linear equations. Applied Optics 60, 8556-8568 (2021). |
| [170] | Wu, Q. et al. Simulation and measurement of systematic errors of stitching interferometry for high precision X-ray mirrors with large radius of curvature. Applied Optics 60, 8694-8705 (2021). |
| [171] | Lan, M. et al. Measurement of aspheric mirrors using arc-region scanning and data stitching technology. The International Journal of Advanced Manufacturing Technology 121, 6035-6048 (2022). |
| [172] | Wang, S. et al. Scanning strategy for surface defects evaluation of large fine optical components. Optics & Laser Technology 156, 108473 (2022). |
| [173] | Wu, Q. et al. Mixed stitching interferometry with correction from one-dimensional profile measurements for high-precision X-ray mirrors. Optics Express 31, 16330-16347 (2023). |
| [174] | Yang, Z. et al. Automatic measurement system for large-aperture-angle non-holonomic spherical stitching with laser differential confocal interference. Applied Optics 63, 699-707 (2024). |
| [175] | Sun, Y. et al. Research on Coherent Stray Light Fringes in Interference Compensation Testing. Photonics 11, 74 (2024). |
| [176] | Stryjewski, E. , Zielinski, R. & Smith, J. Testing The Primary Mirror of the W. M. Keck Observatory. 30th Annual Technical Symposium. 0680, 54-58 (1987). |
| [177] | Mast, T. S. & Nelson, J. E. Fabrication of large optical surfaces using a combination of polishing and mirror bending. SPIE Astronomical Telescopes and Instrumentation for the 21st Century. 1236, 670-681 (1990). |
| [178] | Peter, L. W. et al. Optical quality of the W. M. Keck Telescope. 1994 Symposium on Astronomical Telescopes and Instrumentation for the 21st Century. 2199, 94-104 (1994). |
| [179] | Malacara, D. Optical shop testing (John Wiley & Sons, 2007). |
| [180] | Wu, F. Design of Dall compensator for aspherical surface null testing. Journal of Applied Optics 14, 1-4 (1993). |
| [181] | Offner, A. A Null Corrector for Paraboloidal Mirrors. Applied Optics 2, 153-155 (1963). |
| [182] | Lucian, A. M. Test And Evaluation Of The Hubble Space Telescope 2.4-meter Primary Mirror. 29th Annual Technical Symposium. 0571, 182-190 (1986). |
| [183] | Christopher, J. B. Hubble Space Telescope optics: problems and solutions. Orlando '91. 1494, 528-533 (1991). |
| [184] | McLure, R. J., Dunlop, J. S. & Kukula, M. J. Two-dimensional modelling of optical Hubble Space Telescope and infrared tip-tilt images of quasar host galaxies. Monthly Notices of the Royal Astronomical Society 318, 693-702 (2000). |
| [185] | Park, Y., Casertano, S. & Ferguson, H. C. Optimal Galaxy Shape Measurements for Weak Lensing Applications Using the Hubble Space Telescope Advanced Camera for Surveys. The Astrophysical Journal 600, L159 (2004). |
| [186] | Roland, G. & Marc, C. REOSC contribution to VLT and Gemini. Optical Systems Design and Production. 3739, 40-46 (1999). |
| [187] | Cayrel, M. et al. Gemini 8.2-m primary mirror no. 1 polishing. Astronomical Telescopes and Instrumentation. 3352, 205-215 (1998). |
| [188] | Mountain, C. M., Gillett, F. & Oschmann, J. Gemini 8-m telescopes. Astronomical Telescopes and Instrumentation. 3352, 2-13 (1998). |
| [189] | Tu, S. H. I. et al. Surface testing methods of aspheric optical elements. Chinese Optics 7, 26-46 (2014). |
| [190] | Guo, P., Yu, J. & Shun, X. Null lens design for small aspherical surface with large NA. Optics and Precision Engineering 10, 518-522 (2002). |
| [191] | Ono, A. & Wyant, J. C. Aspherical mirror testing using a CGH with small errors. Applied Optics 24, 560-563 (1985). |
| [192] | Beyerlein, M., Lindlein, N. & Schwider, J. Dual-wave-front computer-generated holograms for quasi-absolute testing of aspherics. Applied Optics 41, 2440-2447 (2002). |
| [193] | Kurita, M. et al. The Seimei telescope project and technical developments. Publications of the Astronomical Society of Japan 72, 48 (2020). |
| [194] | Wang, X. et al. Concave aspheric test combining Dall with Offner null compensation using a plane wave. Applied Optics 59, 8987-8996 (2020). |
| [195] | Ye, L. et al. Testing of large-aperture aspheric mirrors using a single coated lens. Applied Optics 59, 4577-4582 (2020). |
| [196] | de Groot, P. J. et al. Contributions of holography to the advancement of interferometric measurements of surface topography. Light: Advanced Manufacturing 3, 258-277 (2022). |
| [197] | Hao, S. et al. Mapping distortion correction in off-axis aspheric mirror testing with a null compensator. Applied Optics 61, 4040-4046 (2022). |
| [198] | Beisswanger, R., Pruss, C. & Reichelt, S. Retrace error calibration for interferometric measurements using an unknown optical system. Optics Express 31, 27761-27775 (2023). |
| [199] | Qiao, X. et al. Absolute testing of optical flats using minimum norm least squares solutions. Optics Express 32, 37260-37269 (2024). |
| [200] | Xu, K. et al. Accuracy verification methodology for computer-generated hologram used for testing a 3.5-meter mirror based on an equivalent element. Light: Advanced Manufacturing 5, 195-203 (2024). |
| [201] | Kino, M. , Kurita, Mikio Interferometric testing for off-axis aspherical mirrors with computer-generated holograms. Applied Optics 51, 4291-4297 (2012). |
| [202] | Hadaway, J. B. et al. Performance of the primary mirror center-of-curvature optical metrology system during cryogenic testing of the JWST Pathfinder telescope. Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave. 9904, 1445-1454 (2016). |
| [203] | Chaney, D., Hadaway, J. & Lewis, J. Cryogenic radius of curvature matching for the JWST primary mirror segments. SPIE Optical Engineering + Applications. 7439, 336-344 (2009). |
| [204] | Whitman, T. et al. Alignment test results of the JWST Pathfinder Telescope mirrors in the cryogenic environment. SPIE Astronomical Telescopes + Instrumentation. 9904, 1381-1388 (2016). |
| [205] | Shore, P. & Parr-Burman, P. Manufacture of large mirrors for ELTs: a fresh perspective. Optical Systems Design. 5252, 55-62 (2004). |
| [206] | Mercier-Ythier, R. et al. The interferometric test bench for ELT M2: the largest convex precision mirror ever made. SPIE Astronomical Telescopes + Instrumentation. 13100, 380-393 (2024). |
| [207] | Sporer, S. F. TMT: stressed mirror polishing fixture study. SPIE Astronomical Telescopes + Instrumentation. 6267, 961-973 (2006). |
| [208] | McElwain, M. W. et al. The James Webb Space Telescope Mission: optical telescope element design, development, and performance. Publications of the Astronomical Society of the Pacific 135, 058001 (2023). |
| [209] | Zhou, P. & Burge, J. H. Optimal design of computer-generated holograms to minimize sensitivity to fabrication errors. Optics Express 15, 15410-15417 (2007). |
| [210] | Chen, M. et al. Neural network based surface shape modeling of stressed lap optical polishing. Applied Optics 49, 1350-1354 (2010). |
| [211] | Buchnev, O. et al. Deep-Learning-Assisted Focused Ion Beam Nanofabrication. Nano Letters 22, 2734-2739 (2022). |
| [212] | Yan, K. et al. Mapping model of ribbon contour and tool influence function based on distributed parallel neural networks in magneto-rheological finishing. Optics Express 32, 27099-27111 (2024). |
| [213] | Wang, R. et al. Material removal rate optimization with bayesian optimized differential evolution based on deep learning in robotic polishing. Journal of Manufacturing Systems 78, 178-186 (2025). |
| [214] | Zha, Z. et al. Deep learning physical hybrid model-driven in situ cutting force monitoring of ultra-precision diamond turning. Measurement Science and Technology 36, 096120 (2025). |
| [215] | Zhang, Z. et al. Intelligent modeling and detection in grinding: a review of advances, challenges, and prospects. The International Journal of Advanced Manufacturing Technology 138, 4995-5055 (2025). |
| [216] | Lu, X. et al. Prediction of three-dimensional coordinate measurement of space points based on BP neural network. International Journal of Manufacturing Research 15, 218-233 (2020). |
| [217] | Fan, L. et al. Deep learning-based Phase Measuring Deflectometry for single-shot 3D shape measurement and defect detection of specular objects. Optics Express 30, 26504-26518 (2022). |
| [218] | Chang, X. et al. Dynamic Interferometry for Freeform Surface Measurement Based on Machine Learning-Configured Deformable Mirror. Sensors 25, 490 (2025). |
| [219] | Reyna, M. A. J. et al. Calibration of wavefront aberrations using supervised learning and deep learning for a Shack–Hartmann wavefront sensor. Optical Engineering 64, 053101 (2025). |
| [220] | Yu, X. et al. On the use of deep learning for computer-generated holography. iScience 28, 112507 (2025). |
| [221] | Zhang, Z. et al. Fringe-Based Structured-Light 3D Reconstruction: Principles, Projection Technologies, and Deep Learning Integration. Sensors 25, 6296 (2025). |