| [1] | Chen, Z. C. et al. Ultrafast‐laser‐induced nanostructures with continuously tunable period on Au surface for photoluminescence control in monolayer MoS2. Laser & Photonics Reviews 19, 2400715 (2025). doi: 10.1002/lpor.202400715 |
| [2] | Fang, Y. et al. Metasurface‐generated spin‐multiplexed & grafted perfect vector vortex beams for high‐dimensional optical information encryption. Laser & Photonics Reviews 19, 2402033 (2025). doi: 10.1002/lpor.202402033 |
| [3] | Sakakura, M. et al. Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass. Light: Science & Applications 9, 15 (2020). doi: 10.1038/s41377-020-0250-y |
| [4] | Chen, H. T., Taylor, A. J. & Yu, N. F. A review of metasurfaces: physics and applications. Reports on Progress in Physics 79, 076401 (2016). doi: 10.1088/0034-4885/79/7/076401 |
| [5] | Xu, K. et al. All‐glass nanohole metalens by non‐diffracting laser lithography. Laser & Photonics Reviews 19, 2402006 (2025). doi: 10.1002/lpor.202402006 |
| [6] | Hu, J. T. et al. Subwavelength imaging using a solid-immersion diffractive optical processor. eLight 4, 8 (2024). doi: 10.1186/s43593-024-00067-5 |
| [7] | Glezer, E. N. & Mazur, E. Ultrafast-laser driven micro-explosions in transparent materials. Applied Physics Letters 71, 882-884 (1997). doi: 10.1063/1.119677 |
| [8] | Qi, J. et al. Femtosecond laser induced selective etching in fused silica: optimization of the inscription conditions with a high-repetition-rate laser source. Optics Express 26, 29669-29678 (2018). doi: 10.1364/OE.26.029669 |
| [9] | Nwatu, D., Kip, D. & Hasse, K. Femtosecond laser assisted selective etching of microchannels in lithium niobate. Optics Express 31, 37618-37629 (2023). doi: 10.1364/OE.500439 |
| [10] | Okhrimchuk, A. G. et al. Inscription of a waveguide in YAG: Nd crystal with a cladding composed by crystalline hollow channels. Optical Materials Express 12, 1609-1616 (2022). doi: 10.1364/OME.447622 |
| [11] | Huang, J. X., Xu, K. & Xu, S. L. Super-resolution laser machining. International Journal of Machine Tools and Manufacture 205, 104246 (2025). doi: 10.1016/j.ijmachtools.2025.104246 |
| [12] | Yin, J. B. et al. Polarization-independent surface nanostructuring by femtosecond laser irradiation via microsphere in far field and ambient air. Light: Science & Applications 15, 114 (2026). doi: 10.1038/s41377-025-02091-7 |
| [13] | Cai, C. K. et al. Superior ultrafast laser-inscribed photonic-lantern mode (de)multiplexers using trajectory-asymmetry with uniform waveguides. Light: Advanced Manufacturing 6, 2 (2025). doi: 10.37188/lam.2025.002 |
| [14] | Sun, K. et al. Three-dimensional direct lithography of stable perovskite nanocrystals in glass. Science 375, 307-310 (2022). doi: 10.1126/science.abj2691 |
| [15] | Chen, D. Y. et al. 3D laser writing of low-loss cross-section-variable type-I optical waveguide passive/active integrated devices in single crystals. Adv. Mater 36, 2404493 (2024). doi: 10.1002/adma.202404493 |
| [16] | Jia, Y. C. & Chen, F. Recent progress on femtosecond laser micro-/nano-fabrication of functional photonic structures in dielectric crystals: a brief review and perspective. APL Photonics 8, 090901 (2023). doi: 10.1063/5.0160067 |
| [17] | Wang, Q. S. et al. Vortex-field enhancement through high-threshold geometric metasurface. Opto-Electronic Advances 7, 240112 (2024). doi: 10.29026/oea.2024.240112 |
| [18] | Wang, S. T. et al. Femtosecond laser direct writing of flexible electronic devices: a mini review. Materials 17, 557 (2024). doi: 10.3390/ma17030557 |
| [19] | Wu, J. et al. Helical hollow channel waveguide in YAG fabricated by femtosecond laser enhanced wet etching. Optics Letters 49, 2441-2444 (2024). doi: 10.1364/OL.523400 |
| [20] | Lv, J. M. et al. Mid-infrared waveguiding in three-dimensional microstructured optical waveguides fabricated by femtosecond-laser writing and phosphoric acid etching. Photonics Research 8, 257-262 (2020). doi: 10.1364/prj.380215 |
| [21] | Choudhury, D. et al. Three-dimensional microstructuring of yttrium aluminum garnet crystals for laser active optofluidic applications. Applied Physics Letters 103, 041101 (2013). doi: 10.1063/1.4816338 |
| [22] | Li, J. Q. et al. Nanoscale multi-beam lithography of photonic crystals with ultrafast laser. Light: Science & Applications 12, 164 (2023). doi: 10.1038/s41377-023-01178-3 |
| [23] | Yu, J. P. et al. Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation. Optics & Laser Technology 158, 108889 (2023). doi: 10.1016/j.optlastec.2022.108889 |
| [24] | Ródenas, A. et al. Three-dimensional femtosecond laser nanolithography of crystals. Nature Photonics 13, 105-109 (2019). doi: 10.1038/s41566-018-0327-9 |
| [25] | Paz-Buclatin, F. et al. Circularly symmetric nanopores in 3D femtosecond laser nanolithography with burst control and the role of energy dose. Nanophotonics 12, 1511-1525 (2023). doi: 10.1515/nanoph-2022-0665 |
| [26] | Chen, Z. et al. 25 nm-feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography. Nature Communications 16, 7434 (2025). doi: 10.1038/s41467-025-62426-1 |
| [27] | Shen, M. Y. et al. High-density regular arrays of nanometer-scale rods formed on silicon surfaces via femtosecond laser irradiation in water. Nano Letters 8, 2087-2091 (2008). doi: 10.1021/nl080291q |
| [28] | Lei, Y. H. et al. High speed ultrafast laser anisotropic nanostructuring by energy deposition control via near-field enhancement. Optica 8, 1365-1371 (2021). doi: 10.1364/optica.433765 |
| [29] | Gribaudo, E. et al. Sub-wavelength femtosecond laser based nanostructuring of complex patterns in the bulk of fused silica. Optics Express 33, 11529-11540 (2025). doi: 10.1364/oe.555038 |
| [30] | Li, Z. Z. et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment. Light: Science & Applications 9, 41 (2020). doi: 10.1038/s41377-020-0275-2 |
| [31] | Li, Z. Z. et al. Super-stealth dicing of transparent solids with nanometric precision. Nature Photonics 18, 799-808 (2024). doi: 10.1038/s41566-024-01437-8 |
| [32] | Asgari Sabet, R. et al. Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding. Nature Communications 15, 5786 (2024). doi: 10.1038/s41467-024-49303-z |
| [33] | Lin, Z. Y., Ji, L. F. & Hong, M. H. Advancing manufacturing limits: ultrafast laser nanofabrication techniques. Engineering 49, 9-12 (2025). doi: 10.1016/j.eng.2025.03.017 |
| [34] | Ashkenasi, D. et al. Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation. Applied Surface Science 150, 101-106 (1999). doi: 10.1016/s0169-4332(99)00228-7 |
| [35] | Rosenfeld, A. et al. Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation. Applied Physics A: Materials Science & Processing 69, S373-S376 (1999). doi: 10.1007/s003390051419 |
| [36] | Paula, K. T. et al. Femtosecond laser induced damage threshold incubation and oxidation in AS2S3 and AS2Se3 thin films. Applied Surface Science 654, 159449 (2024). doi: 10.1016/j.apsusc.2024.159449 |
| [37] | Couairon, A. & Mysyrowicz, A. Femtosecond filamentation in transparent media. Physics Reports 441, 47-189 (2007). doi: 10.1016/j.physrep.2006.12.005 |
| [38] | Akhmanov, S. A., Sukhorukov, A. P. & Khokhlov, R. V. Self-focusing and diffraction of light in a nonlinear medium. Soviet Physics Uspekhi 10, 609-636 (1968). doi: 10.1070/PU1968v010n05ABEH005849 |
| [39] | Wang, H. T. et al. Dynamics of femtosecond filamentation with higher-order Kerr response. Journal of the Optical Society of America B 28, 2081-2086 (2011). doi: 10.1364/josab.28.002081 |
| [40] | Wang, W. C. et al. A design of nested photonic crystal fiber with low nonlinear and flat dispersion supporting 30+50 OAM modes. Optics Communications 471, 125823 (2020). doi: 10.1016/j.optcom.2020.125823 |
| [41] | Schreiber, T. et al. Stress-induced single-polarization single-transverse mode photonic crystal fiber with low nonlinearity. Optics Express 13, 7621-7630 (2005). doi: 10.1364/opex.13.007621 |