| [1] | Zhong, B. et al. Process chain for ultra-precision and high-efficiency manufacturing of large-aperture silicon carbide aspheric mirrors. Micromachines 14, 737 (2023). doi: 10.3390/mi14040737 |
| [2] | Miyasaka, Y., Kondo, K. & Kiriyama, H. High-thermal-conductivity SiC ceramic mirror for high-average-power laser system. Crystals 10, 831 (2020). doi: 10.3390/cryst10090831 |
| [3] | Chen, B. Q. et al. SiC diffractive waveguides for augmented reality: single-layer, full-color, rainbow-artifact-free display with vision correction. eLight 5, 21 (2025). doi: 10.1186/s43593-025-00100-1 |
| [4] | Zhang, X. J. et al. Challenges and strategies in high-accuracy manufacturing of the world's largest SiC aspheric mirror. Light: Science & Applications 11, 310 (2022). doi: 10.1038/s41377-022-00994-3 |
| [5] | Yan, Y. H. et al. High-precision laser slicing of silicon carbide using temporally shaped ultrafast pulses. Light: Advanced Manufacturing 6, 65 (2025). doi: 10.37188/lam.2025.065 |
| [6] | Rao, X. S. et al. Surface and subsurface damage of reaction-bonded silicon carbide induced by electrical discharge diamond grinding. International Journal of Machine Tools and Manufacture 154, 103564 (2020). doi: 10.1016/j.ijmachtools.2020.103564 |
| [7] | Xie, X. Z. et al. Low-damage precision slicing of SiC by simultaneous dual-beam laser-driven crack expansion of silicon carbide. Optics & Laser Technology 192, 113960 (2025). doi: 10.1016/j.optlastec.2025.113960 |
| [8] | Liu, C. L. et al. Cutting mechanism of reaction-bonded silicon carbide in laser-assisted ultra-precision machining. International Journal of Machine Tools and Manufacture 203, 104219 (2024). doi: 10.1016/j.ijmachtools.2024.104219 |
| [9] | Ganguly, N., Sopeña, P. & Grojo, D. Ultra-high-aspect-ratio structures through silicon using infrared laser pulses focused with axicon-lens doublets. Light: Advanced Manufacturing 5, 22 (2024). doi: 10.37188/lam.2024.022 |
| [10] | Karci, Ö. & Beldek, T. B. Quantitative investigation of abrasive grit size dependency of subsurface damages for the metal-bonded abrasives on Zerodur glass-ceramic. Applied Optics 60, 2624-2632 (2021). doi: 10.1364/ao.419820 |
| [11] | Esmaeilzare, A., Rahimi, A. & Rezaei, S. M. Investigation of subsurface damages and surface roughness in grinding process of Zerodur® glass–ceramic. Applied Surface Science 313, 67-75 (2014). doi: 10.1016/j.apsusc.2014.05.137 |
| [12] | Grundmann, J. et al. Optical and tactile measurements on SiC sample defects. Journal of Sensors and Sensor Systems 13, 109-121 (2024). doi: 10.5194/jsss-13-109-2024 |
| [13] | Quan, H. D., Shi, W. Q. & Kong, L. B. Non-destructive optical measurement of transparent objects: a review. Light: Advanced Manufacturing 6, 22 (2025). doi: 10.37188/lam.2025.022 |
| [14] | Brinksmeier, E. State-of-the-art of non-destructive measurement of sub-surface material properties and damages. Precision Engineering 11, 211-224 (1989). doi: 10.1016/0141-6359(89)90031-7 |
| [15] | Fine, K. R. et al. Non-destructive real-time direct measurement of subsurface damage. Proceedings of SPIE 5799, Modeling, Simulation, and Verification of Space-Based Systems II. Orlando, Florida, United States: SPIE, 2005. doi: 10.1117/12.602993. |
| [16] | Tian, A. L. et al. A novel method for subsurface damage measurement of optical components. Acta Photonica Sinica 42, 214-218 (2013). doi: 10.3788/gzxb20134202.0214 |
| [17] | Neauport, J. et al. Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy. Optics Express 17, 3543-3554 (2009). doi: 10.1364/OE.17.003543 |
| [18] | Williams, W. et al. Using quantum dots to evaluate subsurface damage depths and formation mechanisms in glass. CIRP Annals 59, 569-572 (2010). doi: 10.1016/j.cirp.2010.03.137 |
| [19] | Williams, W. B. et al. Using quantum dots to tag subsurface damage in lapped and polished glass samples. Applied Optics 48, 5155-5163 (2009). doi: 10.1364/AO.48.005155 |
| [20] | Kurniawan, I. S. et al. Nondestructive detection and identification of electrically active threading dislocations in n+-SiC substrates. Nanoscale Advances 8, 331-339 (2026). doi: 10.1039/D5NA00970G |
| [21] | Huang, D. et al. Optical coherence tomography. Science 254, 1178-1181 (1991). doi: 10.1126/science.1957169 |
| [22] | Nie, J. C. et al. Method for extracting optical element information using optical coherence tomography. Sensors 24, 6953 (2024). doi: 10.3390/s24216953 |
| [23] | Xu, Z. Y. et al. Dual beam optical coherence tomography angiography for decoupling axial velocity gradient. Scientific Reports 14, 19464 (2024). doi: 10.1038/s41598-024-68924-4 |
| [24] | Matveev, L. A. et al. Online platform for generating realistic digital phantoms of OCT signals and performing multimodal processing towards optical cancer diagnostics. Light: Advanced Manufacturing 6, 6 (2026). doi: 10.37188/lam.2026.006 |
| [25] | Zhou, C. C. et al. Dynamic needle beam design and intensity uniformity optimization for enhanced optical coherence tomography using liquid crystal spatial light modulator. Optics & Laser Technology 195, 114582 (2026). doi: 10.1016/j.optlastec.2025.114582 |
| [26] | Wang, Y. K. et al. Multi-channel spectral-domain optical coherence tomography using single spectrometer. Chinese Optics Letters 21, 051102 (2023). doi: 10.3788/col202321.051102 |
| [27] | Zhuo, Y. M. et al. Retinal thermal deformations measured with phase-sensitive optical coherence tomography in vivo. Light: Science & Applications 14, 151 (2025). doi: 10.1038/s41377-025-01798-x |
| [28] | Zvagelsky, R. et al. Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography. Light: Advanced Manufacturing 3, 39 (2022). doi: 10.37188/lam.2022.039 |
| [29] | Hasegawa, S. et al. In-process monitoring in laser grooving with line-shaped femtosecond pulses using optical coherence tomography. Light: Advanced Manufacturing 3, 33 (2022). doi: 10.37188/lam.2022.033 |
| [30] | Hu, Y. Z. & Gao, W. R. Detecting subsurface damage within glasses with polarization-sensitive optical coherence tomography. Optics & Laser Technology 177, 111146 (2024). doi: 10.1016/j.optlastec.2024.111146 |
| [31] | Israelsen, N. M. et al. Real-time high-resolution mid-infrared optical coherence tomography. Light: Science & Applications 8, 11 (2019). doi: 10.1038/s41377-019-0122-5 |
| [32] | Rao, D. S. S. et al. Shot-noise limited, supercontinuum-based optical coherence tomography. Light: Science & Applications 10, 133 (2021). doi: 10.1038/s41377-021-00574-x |
| [33] | Zhao, Y. et al. Dual-axis optical coherence tomography for deep tissue imaging. Optics Letters 42, 2302-2305 (2017). doi: 10.1364/ol.42.002302 |
| [34] | Matthews, T. E. et al. Deep tissue imaging using spectroscopic analysis of multiply scattered light. Optica 1, 105-111 (2014). doi: 10.1364/optica.1.000105 |
| [35] | Untracht, G. R. et al. Spatially offset optical coherence tomography: leveraging multiple scattering for high-contrast imaging at depth in turbid media. Science Advances 9, eadh5435 (2023). doi: 10.1126/sciadv.adh5435 |