[1] Yadav, H. N. S. & Manas, D. Advances in finishing of optical complex substrates: a comprehensive review. Optics & Laser Technology 176, 110938 (2024). doi: 10.1016/j.optlastec.2024.110938
[2] Lu, B. H. et al. Nano/sub-nanometer precision manufacturing. in Fundamental Research on Nanomanufacturing (ed Lu, B. H. ) (Singapore: Springer), 29-39 doi: 10.1007/978-981-19-8975-9_3 (2023).
[3] Wagner, C. & Harned, N. Lithography gets extreme. Nature Photonics 4, 24-26 (2010). doi: 10.1038/nphoton.2009.251
[4] Rolland, J. P. et al. Freeform optics for imaging. Optica 8, 161-176 (2021). doi: 10.1364/optica.413762
[5] Tseng, E. et al. Neural nano-optics for high-quality thin lens imaging. Nature Communications 12, 6493 (2021). doi: 10.1038/s41467-021-26443-0
[6] Norvig P, Relman D A, Goldstein D B, et al. 2020 visions. Nature, 463(7): 26-32 (2010).
[7] Zhu, W. L. & Beaucamp, A. Generic three-dimensional model of freeform surface polishing with non-Newtonian fluids. International Journal of Machine Tools and Manufacture 172, 103837 (2022). doi: 10.1016/j.ijmachtools.2021.103837
[8] Wan, K. P. et al. Sparse bi-step raster path for suppressing the mid-spatial-frequency error by fluid jet polishing. Optics Express 30, 6603-6616 (2022). doi: 10.1364/oe.453122
[9] Yamato, S., Sencer, B. & Beaucamp, A. Concurrent process and feedrate scheduling with convoluted basis functions and its application to fluid jet polishing. International Journal of Machine Tools and Manufacture 197, 104135 (2024). doi: 10.1016/j.ijmachtools.2024.104135
[10] Xie, L. B. et al. Adaptive processing strategy of pulse ion beam for sub-nanometer precision optical components. Journal of Materials Processing Technology, 327, 118341 (2024). doi: 10.1016/j.jmatprotec.2024.118341
[11] Aryan, H., Boreman, G. D. & Suleski, T. J. The minimum modulation curve as a tool for specifying optical performance: application to surfaces with mid-spatial frequency errors. Optics Express 27, 25551-25559 (2019). doi: 10.1364/OE.27.025551
[12] Shahinian, H. & Mullany, B. Fiber based polishing tools for optical applications. Optical Fabrication and Testing 2017. Denver, Co, USA: Optica Publishing Group, doi: 10.1364/OFT.2017.OTu2B.4 (2017).
[13] Bouyer, C. et al. Nonlinear processes and laser damage induced by a temporally modulated nanosecond UV laser beam. Part II: Kerr self-focusing. Journal of the Optical Society of America B 40, 2305-2314 (2023). doi: 10.1364/josab.494065
[14] Zhang, J. et al. Experimental and theoretical study of internal finishing by a novel magnetically driven polishing tool. International Journal of Machine Tools and Manufacture 153, 103552 (2020). doi: 10.1016/j.ijmachtools.2020.103552
[15] Xia, Z. B. et al. Advances in polishing of optical freeform surfaces: a review. Journal of Materials Processing Technology 286, 116828 (2020). doi: 10.1016/j.jmatprotec.2020.116828
[16] Chaves-Jacob, J. et al. Towards an understanding of surface finishing with compliant tools using a fast and accurate simulation method. International Journal of Machine Tools and Manufacture 163, 103704 (2021). doi: 10.1016/j.ijmachtools.2021.103704
[17] Shi, F. et al. Advances in shape controllable and property controllable manufacturing technology for ultraviolet fused silica components with high precision and few defects. High Power Laser and Particle Beams 32, 032002 (2020). doi: 10.11884/HPLPB202032.190399
[18] Li, H. J. et al. High-efficiency smooth pseudo-random path planning for restraining the path ripple of robotic polishing. Applied Optics 60, 7732-7739 (2021). doi: 10.1364/ao.426616
[19] Cui, Z. J. et al. Process parameter analysis of ultrasonic vibration-assisted polishing of SiCp/Al ceramics based on optimized Hilbert trajectories. Journal of Materials Research and Technology 27, 7673-7684 (2023). doi: 10.1016/j.jmrt.2023.11.165
[20] Wang, C. J., Wang, Z. Z. & Xu, Q. Unicursal random maze tool path for computer-controlled optical surfacing. Applied Optics 54, 10128-10136 (2015). doi: 10.1364/ao.54.010128
[21] Wan, S. L. et al. Modeling and analysis of the mid-spatial-frequency error characteristics and generation mechanism in sub-aperture optical polishing. Optics Express 28, 8959-8973 (2020). doi: 10.1364/OE.388848
[22] Hu, H., Dai, Y. F. & Peng, X. Q. Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing. Optics Express 18, 22973-22981 (2010). doi: 10.1364/OE.18.022973
[23] Wan, S. L. et al. Novel magic angle-step state and mechanism for restraining the path ripple of magnetorheological finishing. International Journal of Machine Tools and Manufacture 161, 103673 (2021). doi: 10.1016/j.ijmachtools.2020.103673
[24] Wang, B. et al. Research on the influence of the non-stationary effect of the magnetorheological finishing removal function on mid-frequency errors of optical component surfaces. Optics Express, 31, 35016-35031 (2023). doi: 10.1364/oe.501830
[25] Wang, C. J. et al. Development of a fluid line-jet polishing process for rotational axisymmetric surfaces. Journal of Manufacturing Processes 61, 15-24 (2021). doi: 10.1016/j.jmapro.2020.10.069
[26] Bauer, J. et al. Improved ion beam tools for ultraprecision figure correction of curved aluminum mirror surfaces. Journal of Astronomical Telescopes, Instruments, and Systems 4, 046003 (2018). doi: 10.1117/1.jatis.4.4.046003
[27] Qiao, D. Y. et al. Controllable variable beam diameter ion source based on the Einzel lens. Vacuum 228, 113503 (2024). doi: 10.1016/j.vacuum.2024.113503
[28] Zhang, J. & Wang, H. Generic model of time-variant tool influence function and dwell-time algorithm for deterministic polishing. International Journal of Mechanical Sciences 211, 106795 (2021). doi: 10.1016/j.ijmecsci.2021.106795
[29] Pinto, R. V. & Fiorelli, F. A. S. Evaluation of the use of constraints in step-by-step algorithms for the solution of a 2D inverse heat transfer problem. Frontiers in Heat and Mass Transfer 19, 1-10 (2022). doi: 10.5098/hmt.19.30
[30] Mead, J. L. & Renaut, R. A. Least squares problems with inequality constraints as quadratic constraints. Linear Algebra and its Applications 432, 1936-1949 (2010). doi: 10.1016/j.laa.2009.04.017
[31] Wang, G. et al. Correction of different spatial frequency errors of large and thin optical windows based on ion beam figuring. Proceedings of SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application. Nanjing, China: SPIE, doi: 10.1117/12.2585302 (2020).
[32] Zhou, L. et al. Frequency-domain analysis of computer-controlled optical surfacing processes. Science in China Series E: Technological Sciences 52, 2061-2068 (2009). doi: 10.1007/s11431-009-0111-7
[33] Wang, Y. S. et al. Research on the removal characteristics of surface error with different spatial frequency based on shear thickening polishing method. Optics Express 32, 19626-19644 (2024). doi: 10.1364/oe.518614
[34] Lambora, A. , Gupta, K. & Chopra, K. Genetic algorithm-a literature review. 2019 International Conference on Machine Learning, Big Data, Cloud and Parallel Computing (COMITCon). Faridabad, India: IEEE, doi: 10.1109/COMITCon.2019.8862255 (2019).